Stroke 行程 |
X axis:± X軸:± |
X axis:± X軸:± |
X axis:± X軸:± |
X axis:± X軸:± |
X axis:± X軸:± |
Y axis:± Y軸:± |
Y axis:± Y軸:± |
Y axis:± Y軸:± |
Y axis:± Y軸:± |
Y axis:± Y軸:± |
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θaxis:±3° θ軸:±3° |
θaxis:±3° θ軸:±3° |
θaxis:±2.5° θ軸:±2.5° |
θaxis:±3° θ軸:±3° |
θaxis:±3° θ軸:±3° |
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Table size工作臺(tái)尺寸 |
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Base size 基座尺寸 |
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Height高度 |
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Motor 電機(jī) |
Setpping motor 步進(jìn)馬達(dá) |
Setpping motor 步進(jìn)馬達(dá) |
Setpping motor 步進(jìn)馬達(dá) |
Setpping motor 步進(jìn)馬達(dá) |
Servomotor 伺服馬達(dá) |
Stage material 平臺(tái)材質(zhì) |
Lron :low temperature black chrome plating treatment Aluminum :Black alumite treatment 鐵：低溫黑色鉻處理 鋁：黑色耐酸鋁處理 |
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Weight重量 |
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Resolution(factory seting)分辨率（出廠時(shí)設(shè)定） |
0.2μm/pulse |
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Repetitive bing accuracy 重復(fù)定位精度 |
Within±1μm ±1μm以內(nèi) |
Within±0.7μm ±0.7μm以內(nèi) |
Within±1μm ±1μm以內(nèi) |
Within±1μm ±1μm以內(nèi) |
Within±0.7μm ±0.7μm以內(nèi) |
Lost motion 無效運(yùn)動(dòng) |
Within3μm 3μm以內(nèi) |
Within2μm 2μm以內(nèi) |
Within2μm 2μm以內(nèi) |
Within2μm 2μm以內(nèi) |
Within2μm 2μm以內(nèi) |
Load carrying capacity when stopped (Distributed load in the vertical direction) 靜止時(shí)負(fù)載功率（垂直方向等分布載荷） |
50N |
500N |
1000N |
2000N |
3000N |
Load carrying capacity when moving (Distributed load in the vertical direction) 移動(dòng)時(shí)負(fù)載功率（垂直方向等分布載荷） |
10N |
100N |
200N |
400N |
500N |
Degree of parallelism平行度 |
30μm |
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To other stsyem 至其他設(shè)置 |
Motor driver 電機(jī)驅(qū)動(dòng) |
Motor cable 電機(jī)電纜 |
Sensor cable 傳感器電纜 |
Sequencer 定序器 |
Camera 攝像機(jī) |
Image Processing System 圖像處理裝置 |
(chip components ,PCB,FPC) (LCD,EL, touch panel ,solar cell)
絲網(wǎng)打印機(jī) 面板貼合、COG、FOG、貼裝裝置
(片狀部件、PCB、電路板、FPC電路板) (LCD、EL、觸摸面板民、太陽能電池)
曝光機(jī) 探測器檢測裝置
(片狀部件/PCB電路板/FPC電路板) (PBC電路板、水晶設(shè)備、電子部件、FPD亮燈檢測)
Ultra Slim Stage with Electric Actuators arranged on the Same Plan
將電動(dòng)傳動(dòng)裝置安裝于同一平面上的超薄型平臺(tái)
Employs a slider with a “preload double slide ” construction that consists of a middle plate inserted between upper and ower plates
Features an array of balls arranged between each plate that enables smooth ,flat plane rolling motion
A simple , ultra slim construction with a low center of gravity achieved by the three actuators bed on the same plane
This construction contributes to device miniaturization
滑動(dòng)部分采用的結(jié)構(gòu)是通過上下2片板將中間板夾住的“預(yù)滑型雙滑動(dòng)”構(gòu)造。
要各板這間裝有多個(gè)滑珠，實(shí)現(xiàn)了平穩(wěn)的平面滾動(dòng)運(yùn)動(dòng)。
而且由于3個(gè)傳動(dòng)裝置安裝在同一個(gè)平面上，因此實(shí)現(xiàn)了低重心，超薄型的簡單構(gòu)造。對裝置的小型化做出了貢獻(xiàn)。
Ultra slim and simple construction Small footprint
超薄型簡單構(gòu)造 節(jié)省空間
商精度定位 低重心平臺(tái)
高剛性
1
2
Driving each of 3 actuators arranged on the same plane enables a variety of table movement.
使安裝在同一平面上的3個(gè)傳動(dòng)裝置各自進(jìn)行動(dòng)作以此進(jìn)行動(dòng)作,以此可實(shí)現(xiàn)各種工作臺(tái)動(dòng)作.
Driving the V and W axes the same amount in the same direction moves the Y direction 使V、W軸在同一方向上進(jìn)行相同的動(dòng)作，則工作臺(tái)向Y方向移動(dòng) Driving the U axis moves the table in the X direction使U軸動(dòng)作,則工作臺(tái)向X方向動(dòng)
Example of rotating the table using the table center as the axis of rotation (θ axis)這是工作臺(tái)以工作臺(tái)中心為旋轉(zhuǎn)中心進(jìn)行旋轉(zhuǎn)（θ軸）的示例 Driving the V and W axes the same amount in the same direction while driving the U axis moves the table diagonally 使V、W軸在同一方向上進(jìn)行相同量的動(dòng)作，同時(shí)也使U軸動(dòng)作，則工作臺(tái)向傾斜方向移動(dòng)
Example of rotating the table using an arbitrary point as the axis of rotation(θ axis).這是工作臺(tái)以任意點(diǎn)為中心進(jìn)行旋轉(zhuǎn)（θ軸）的示例
