A-B 1734-TB
A-B 1734-TBA-B 1734-TB
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眾所周知，現(xiàn)階段中國(guó)制造業(yè)正面臨著四大挑戰(zhàn)，包括歐美發(fā)達(dá)國(guó)家和發(fā)展中國(guó)家的“前后夾擊”；勞動(dòng)力、土地成本等要素成本快速上升；國(guó)內(nèi)經(jīng)濟(jì)轉(zhuǎn)入中速增長(zhǎng)期；資源環(huán)境約束進(jìn)一步增強(qiáng)。而與此同時(shí)，中國(guó)制造業(yè)卻是大而不強(qiáng)，自主創(chuàng)新能力不足，資源利用效率偏低，產(chǎn)業(yè)結(jié)構(gòu)不盡合理。
李培根指出，2013年4月，德國(guó)在漢諾威工業(yè)博覽會(huì)期間推出了“工業(yè)4.0”，
眾所周知，現(xiàn)階段中國(guó)制造業(yè)正面臨著四大挑戰(zhàn)，包括歐美發(fā)達(dá)國(guó)家和發(fā)展中國(guó)家的“前后夾擊”；勞動(dòng)力、土地成本等要素成本快速上升；國(guó)內(nèi)經(jīng)濟(jì)轉(zhuǎn)入中速增長(zhǎng)期；資源環(huán)境約束進(jìn)一步增強(qiáng)。而與此同時(shí)，中國(guó)制造業(yè)卻是大而不強(qiáng)，自主創(chuàng)新能力不足，資源利用效率偏低，產(chǎn)業(yè)結(jié)構(gòu)不盡合理。
李培根指出，2013年4月，德國(guó)在漢諾威工業(yè)博覽會(huì)期間推出了“工業(yè)4.0”，這也是業(yè)界稱之為以智能制造為主導(dǎo)的新工業(yè)革命。以此為例，不難看出歐美等發(fā)達(dá)國(guó)家正在以數(shù)字化網(wǎng)絡(luò)化智能化技術(shù)應(yīng)用作為重點(diǎn)，力圖依靠科技創(chuàng)新，搶占國(guó)際產(chǎn)業(yè)競(jìng)爭(zhēng)的制高點(diǎn)，謀求未來發(fā)展的主動(dòng)權(quán)。“中國(guó)要后來居上，必然是一個(gè)并聯(lián)式發(fā)展過程，要求工業(yè)化、信息化、城鎮(zhèn)化、農(nóng)業(yè)現(xiàn)代化同步發(fā)展，同時(shí)完成工業(yè)2.0，3.0，4.0的變化”。
他指出，中國(guó)建設(shè)制造強(qiáng)國(guó)應(yīng)具備四個(gè)主要特征：一是雄厚的產(chǎn)業(yè)規(guī)模。二是優(yōu)化的產(chǎn)業(yè)結(jié)構(gòu)。三是良好的質(zhì)量效益。四是持續(xù)的發(fā)展能力。根據(jù)包括了以上特征的制造業(yè)綜合指數(shù)，可以構(gòu)建出判斷制造強(qiáng)國(guó)的基礎(chǔ)數(shù)據(jù)體系。而再根據(jù)這一綜合指數(shù)數(shù)據(jù)，可以看到，世界各國(guó)均經(jīng)歷了一個(gè)從弱到強(qiáng)的過程，此過程與其工業(yè)化進(jìn)程相吻合。2012年，主要工業(yè)化國(guó)家的制造業(yè)綜合指數(shù)分布中，美國(guó)遙遙領(lǐng)先，處于第一方陣，德國(guó)、日本處于第二方陣，而我國(guó)及英國(guó)、法國(guó)、韓國(guó)則處在第三方陣。
在國(guó)際政治格局不發(fā)生重大變化的情況下，綜合考慮工業(yè)發(fā)達(dá)國(guó)家工業(yè)化進(jìn)程各階段綜合指數(shù)的增長(zhǎng)率和中國(guó)的GDP增長(zhǎng)率，構(gòu)建適合中國(guó)國(guó)情的綜合指數(shù)預(yù)測(cè)模型，并對(duì)未來30~40年中國(guó)制造業(yè)綜合指數(shù)發(fā)展趨勢(shì)進(jìn)行預(yù)測(cè)，可以得出：中國(guó)將會(huì)在2020年進(jìn)入工業(yè)化后期。而在2025年中國(guó)制造業(yè)可進(jìn)入世界第二方陣，邁入制造強(qiáng)國(guó)的行列。此外，在2035年，中國(guó)制造業(yè)將會(huì)位居第二方陣的前列，成為名副其實(shí)的制造強(qiáng)國(guó)。而在2045年中國(guó)制造業(yè)有望進(jìn)入到第一方陣，成為具有全球引領(lǐng)影響力的制造強(qiáng)國(guó)。
革命性的核心技術(shù)
為實(shí)現(xiàn)制造強(qiáng)國(guó)的目標(biāo)，李培根提出了加快建設(shè)的指導(dǎo)方針，即創(chuàng)新驅(qū)動(dòng)、質(zhì)量為先、綠色發(fā)展以及結(jié)構(gòu)優(yōu)化。其中，建設(shè)制造強(qiáng)國(guó)的8項(xiàng)戰(zhàn)略對(duì)策分別為：大力推行數(shù)字化網(wǎng)絡(luò)化智能化制造；提高創(chuàng)新設(shè)計(jì)能力；完善技術(shù)創(chuàng)新體系；強(qiáng)化制造基礎(chǔ)；提升產(chǎn)品質(zhì)量；推行綠色制造；培育具有國(guó)際競(jìng)爭(zhēng)力的企業(yè)群體和優(yōu)勢(shì)產(chǎn)業(yè)；發(fā)展現(xiàn)代制造服務(wù)業(yè)。
他指出，數(shù)字化網(wǎng)絡(luò)化智能化制造是制造業(yè)發(fā)生革命性變化的核心技術(shù)。制造業(yè)創(chuàng)新的內(nèi)涵包括三個(gè)方面，在這三個(gè)方面，數(shù)字化網(wǎng)絡(luò)化智能化都是制造業(yè)創(chuàng)新的主要途徑。在產(chǎn)品創(chuàng)新方面，制造業(yè)的數(shù)字化、網(wǎng)絡(luò)化、智能化是實(shí)現(xiàn)產(chǎn)品創(chuàng)新的共性技術(shù)，將數(shù)字技術(shù)和智能技術(shù)植入產(chǎn)品，使產(chǎn)品的功能極大豐富，使產(chǎn)品向數(shù)控一代和智能一代發(fā)展，從根本上提高產(chǎn)品功能、性能和市場(chǎng)競(jìng)爭(zhēng)力。
李培根說到，“數(shù)字化網(wǎng)絡(luò)化智能化是新科技革命和產(chǎn)業(yè)變革的核心技術(shù)，是信息化和工業(yè)化融合的主要方面，是對(duì)傳統(tǒng)產(chǎn)業(yè)進(jìn)行轉(zhuǎn)型升級(jí)的主要技術(shù)手段，也是中國(guó)制造業(yè)走向世界強(qiáng)國(guó)的主線”。據(jù)他透露，我國(guó)將在2020年前廣泛推行數(shù)字化制造，同時(shí)在優(yōu)勢(shì)行業(yè)以重點(diǎn)企業(yè)為主體開展智能制造應(yīng)用示范。2020年之后，將在重點(diǎn)產(chǎn)業(yè)推廣智能制造。
部分領(lǐng)域有望率先突破
李培根指出，設(shè)計(jì)是產(chǎn)品創(chuàng)新的第一步，決定了產(chǎn)品成本的70%，是延伸產(chǎn)業(yè)鏈和創(chuàng)新鏈的關(guān)鍵環(huán)節(jié)，相關(guān)部門須高度重視。
他強(qiáng)調(diào)，對(duì)制造業(yè)而言，創(chuàng)新能力建設(shè)是實(shí)現(xiàn)創(chuàng)新驅(qū)動(dòng)發(fā)展戰(zhàn)略的保障。對(duì)此要著力解決科技與經(jīng)濟(jì)結(jié)合不緊密的問題，以改革激發(fā)企業(yè)的創(chuàng)新動(dòng)力，促進(jìn)企業(yè)真正成為技術(shù)創(chuàng)新的主體。要加強(qiáng)產(chǎn)業(yè)共性技術(shù)的研究開發(fā)，為技術(shù)和產(chǎn)品創(chuàng)新提供取之不盡的思想源泉。
要不斷強(qiáng)化制造業(yè)的基礎(chǔ)，包括基礎(chǔ)材料、基礎(chǔ)零部件、基礎(chǔ)制造工藝和技術(shù)基礎(chǔ)。工業(yè)“四基”在很大程度上決定著產(chǎn)品質(zhì)量的優(yōu)劣，是提高產(chǎn)品質(zhì)量的基礎(chǔ)，應(yīng)高度重視。
根據(jù)相關(guān)規(guī)劃，在2020年之前，我國(guó)將選擇與國(guó)際先進(jìn)水平較為接近的8大產(chǎn)業(yè)，包括航天裝備、通信裝備、發(fā)電與輸變電裝備、工程機(jī)械、軌道交通、鋼鐵、石油煉制、家用電器等方面，進(jìn)行重點(diǎn)突破，力爭(zhēng)到2020年實(shí)現(xiàn)又大又強(qiáng)。
此外，還要大力支持和優(yōu)先發(fā)展國(guó)民經(jīng)濟(jì)、國(guó)防建設(shè)和人民生活休戚相關(guān)的5大戰(zhàn)略必爭(zhēng)產(chǎn)業(yè)。在集成電路及其專用生產(chǎn)裝備，數(shù)控機(jī)床與基礎(chǔ)制造裝備，航空裝備，海洋工程裝備及船舶，汽車等領(lǐng)域，要掌握核心技術(shù)，縮短與國(guó)際先進(jìn)水平的差距，能基本滿足國(guó)內(nèi)需求。
據(jù)李培根介紹，目前政府部門正在制定的《中國(guó)制造2025》，四大轉(zhuǎn)變和一條主線分別為：由要素驅(qū)動(dòng)向創(chuàng)新驅(qū)動(dòng)轉(zhuǎn)變；由低成本競(jìng)爭(zhēng)優(yōu)勢(shì)向質(zhì)量效益競(jìng)爭(zhēng)優(yōu)勢(shì)轉(zhuǎn)變；由資源消耗大、污染物排放多的粗放制造向綠色制造轉(zhuǎn)變；由生產(chǎn)型制造向服務(wù)型制造轉(zhuǎn)變。主線則是將體現(xiàn)信息技術(shù)與制造技術(shù)深度融合的數(shù)字化智能化制造作為今后發(fā)展的主線。
這也是業(yè)界稱之為以智能制造為主導(dǎo)的新工業(yè)革命。以此為例，不難看出歐美等發(fā)達(dá)國(guó)家正在以數(shù)字化網(wǎng)絡(luò)化智能化技術(shù)應(yīng)用作為重點(diǎn)，力圖依靠科技創(chuàng)新，搶占國(guó)際產(chǎn)業(yè)競(jìng)爭(zhēng)的制高點(diǎn)，謀求未來發(fā)展的主動(dòng)權(quán)。“中國(guó)要后來居上，必然是一個(gè)并聯(lián)式發(fā)展過程，要求工業(yè)化、信息化、城鎮(zhèn)化、農(nóng)業(yè)現(xiàn)代化同步發(fā)展，同時(shí)完成工業(yè)2.0，3.0，4.0的變化”。
他指出，中國(guó)建設(shè)制造強(qiáng)國(guó)應(yīng)具備四個(gè)主要特征：一是雄厚的產(chǎn)業(yè)規(guī)模。二是優(yōu)化的產(chǎn)業(yè)結(jié)構(gòu)。三是良好的質(zhì)量效益。四是持續(xù)的發(fā)展能力。根據(jù)包括了以上特征的制造業(yè)綜合指數(shù)，可以構(gòu)建出判斷制造強(qiáng)國(guó)的基礎(chǔ)數(shù)據(jù)體系。而再根據(jù)這一綜合指數(shù)數(shù)據(jù)，可以看到，世界各國(guó)均經(jīng)歷了一個(gè)從弱到強(qiáng)的過程，此過程與其工業(yè)化進(jìn)程相吻合。2012年，主要工業(yè)化國(guó)家的制造業(yè)綜合指數(shù)分布中，美國(guó)遙遙領(lǐng)先，處于第一方陣，德國(guó)、日本處于第二方陣，而我國(guó)及英國(guó)、法國(guó)、韓國(guó)則處在第三方陣。
在國(guó)際政治格局不發(fā)生重大變化的情況下，綜合考慮工業(yè)發(fā)達(dá)國(guó)家工業(yè)化進(jìn)程各階段綜合指數(shù)的增長(zhǎng)率和中國(guó)的GDP增長(zhǎng)率，構(gòu)建適合中國(guó)國(guó)情的綜合指數(shù)預(yù)測(cè)模型，并對(duì)未來30~40年中國(guó)制造業(yè)綜合指數(shù)發(fā)展趨勢(shì)進(jìn)行預(yù)測(cè)，可以得出：中國(guó)將會(huì)在2020年進(jìn)入工業(yè)化后期。而在2025年中國(guó)制造業(yè)可進(jìn)入世界第二方陣，邁入制造強(qiáng)國(guó)的行列。此外，在2035年，中國(guó)制造業(yè)將會(huì)位居第二方陣的前列，成為名副其實(shí)的制造強(qiáng)國(guó)。而在2045年中國(guó)制造業(yè)有望進(jìn)入到第一方陣，成為具有全球引領(lǐng)影響力的制造強(qiáng)國(guó)。
革命性的核心技術(shù)
為實(shí)現(xiàn)制造強(qiáng)國(guó)的目標(biāo)，李培根提出了加快建設(shè)的指導(dǎo)方針，即創(chuàng)新驅(qū)動(dòng)、質(zhì)量為先、綠色發(fā)展以及結(jié)構(gòu)優(yōu)化。其中，建設(shè)制造強(qiáng)國(guó)的8項(xiàng)戰(zhàn)略對(duì)策分別為：大力推行數(shù)字化網(wǎng)絡(luò)化智能化制造；提高創(chuàng)新設(shè)計(jì)能力；完善技術(shù)創(chuàng)新體系；強(qiáng)化制造基礎(chǔ)；提升產(chǎn)品質(zhì)量；推行綠色制造；培育具有國(guó)際競(jìng)爭(zhēng)力的企業(yè)群體和優(yōu)勢(shì)產(chǎn)業(yè)；發(fā)展現(xiàn)代制造服務(wù)業(yè)。
他指出，數(shù)字化網(wǎng)絡(luò)化智能化制造是制造業(yè)發(fā)生革命性變化的核心技術(shù)。制造業(yè)創(chuàng)新的內(nèi)涵包括三個(gè)方面，在這三個(gè)方面，數(shù)字化網(wǎng)絡(luò)化智能化都是制造業(yè)創(chuàng)新的主要途徑。在產(chǎn)品創(chuàng)新方面，制造業(yè)的數(shù)字化、網(wǎng)絡(luò)化、智能化是實(shí)現(xiàn)產(chǎn)品創(chuàng)新的共性技術(shù)，將數(shù)字技術(shù)和智能技術(shù)植入產(chǎn)品，使產(chǎn)品的功能極大豐富，使產(chǎn)品向數(shù)控一代和智能一代發(fā)展，從根本上提高產(chǎn)品功能、性能和市場(chǎng)競(jìng)爭(zhēng)力。
李培根說到，“數(shù)字化網(wǎng)絡(luò)化智能化是新科技革命和產(chǎn)業(yè)變革的核心技術(shù)，是信息化和工業(yè)化融合的主要方面，是對(duì)傳統(tǒng)產(chǎn)業(yè)進(jìn)行轉(zhuǎn)型升級(jí)的主要技術(shù)手段，也是中國(guó)制造業(yè)走向世界強(qiáng)國(guó)的主線”。據(jù)他透露，我國(guó)將在2020年前廣泛推行數(shù)字化制造，同時(shí)在優(yōu)勢(shì)行業(yè)以重點(diǎn)企業(yè)為主體開展智能制造應(yīng)用示范。2020年之后，將在重點(diǎn)產(chǎn)業(yè)推廣智能制造。
部分領(lǐng)域有望率先突破
Samco DP-200D Diamond Like Carbon (DLC) PECVD & Etch
STS Multiplex ICP chamber, Plasma Source, good parts
Orion Reticle Photomask Inspection with Aludra system
Ultratech Stepper Model 2700, used for Parts or rebuilt
ADVANCED ENERGY MDX-10K and MDX-20K, lots of 16, used
2 Zygo KMS400 Inspection equipment, Objectives, stages
POWER SUPPLY RF Generators, LOT OF 9 USED
TEL ETCH RF generator rack and Turbo controller rack
ADVANCED ENERGY DC Power Supply lots of 10, used, a
Brooks 001-7600-02 VacuTran 5 VTR5 Transfer Robot Drive
Nicolet ECO-8S FTIR Spectrometer
JEOL JSM-6400 F SEM, scanning electron microscope
Varian Portatest II model 956 leak checker, Tested
Advanced Energy VHF 2060 RF GENERATOR AMAT 0920-00056
CTI IS 1000 Cryo Compressor 8135921G001 AMAT3620-00317
4 used AE Advanced Energy HFV 8000 RF Generator
2 NEW AMAT 0100-76181 WIRING DISTRIBUTION PCB CVD 5000
30 STEC MFC SEC-4400M, WF6, SiH4, SiF4, Used
NANOMETRICS NANOLINE IV line b measuring system
Semitool WST-306M Solvent Spray, 5 or 6 inch wafer,used
MECS Transfer Robot Track YC505, MECS CS7000 controller
Veeco XRF-2000AT X-Ray Measurement System
Novellus Sequel HDP Speed chamber body
APPLIED MATERIALS, AMAT 0010-21668 PVD magnet. New
YES-RCM3, Yield Engineering System
RFPP 7520581010, RFPP AE RF50S 5KW RF power products
AE APEX 1513, 1.5 K HALO A3L5L000BA140D111A, 0920-00067
AE 3156110-014 APEX 1513, 1.5KW A8L2A000BA140L011A, New
Advanced Energy PDX 5000 RF GENERATOR 3156043-207 A
AMAT 0010-37163 Throttle valve assy 2 phase chamber
AMAT 0010-37163 assy, DPS Chamber throttle valve NEW
New Applied Material 0010-37163 DPS Cham throttle valve
AMAT 0010-70264 & AMAT 0010-70149 HP Robot Driver
NEW FOCUS, AFOP MODEL GYCW-3 FIBER OPTIC Work Station
Leybold/Oerlikon TMP 1100C turbo pump, look very clean
2 unit AE Apex 4000-27 RF Generator, 4000 W, 27.12 MHz
NEW FOCUS, AFOP MODEL GYCW-4 FIBER OPTIC Work Station
NEW AE MDX-L6 POWER SUPPLY 3152343-000B, 0190-76190-001
AE Navigator RF MATCH 3155132-002 C, AMAT 0920-00004
AE Navigator RF MATCH 3155132-001 D, AMAT 0190-15168
COMDEL CLX2500 RF GENERATOR AMAT 0190-01370W CALIBRATED
Osaka Turbo pump TS 443CW and Turbo Controller TD360
Tokyo Electron TEL Fujikin WVG Water Vapor Generator
Advanced Energy RFG 3000 3155038-000 E Power supply
Advanced Energy RFG 1250 RF Generator AE 3155027-000 S
Comdel CLF-5000 RF Generator, Novellus 27-10140-00,
TWO CTI CRYOGENICS 8107813G001, 8F cryopump, used
TECHWARE PROCESS CONTROLLER TC 3P-DX, looks very clean.
NEW Advanced Energy Navigator RF MATCH 3155132-001 D
Unit 8560 Series DeviceNet UFC-8565 O2 He Lot's of 8
REICHERT EPISTAR MICROSCOPE 2571 Lots of 5
Trazar Corp. RF Match AMU10E-2, REV.A, P/N 27-118072-00
BOC EDWARDS QDP80 DRY VACUUM PUMP WITH AMAT CONTROLLER
STEC LSC- 8410B, Liquid Source Controller, Looks clean
KOMATSU ELECTRONICS DW621 NEW IN BOX
AE ADVANCED ENERGY PLASMA 3151802-003 AMAT 0920-00124
AMAT HEAT EXCHANGER AMAT 0 ENDURA SYSTEM P544
CTI-CRYOGENICS 8300 compressor, 8001 controller
CTI-CRYOGENICS 8300 compressor, 8004 controller
Seiko Seiki Turbo Controller unit STP-H1000C lots of 2
CTI CRYOGENICS 8033165 CRYO PUMP 8, looks very clean
18 used Tylan FC-260 MFC, H2, O2, HCl, Cl2, WF6
EDWARDS QDP80 DRY VACUUM PUMP + AMAT CONTROLLER BOX
EDWARDS QDP80 DRY VACUUM PUMP with controller box
BOC EDWARDS QDP80 DRY VACUUM PUMP 208V + CONTROLLER BOX
Lot of 10 MFC, UNIT UFC-1660, N2, He, Unit MFC
Lot of 10 MFC, UNIT UFC-1660, N2, Cl2, O2 Unit MFC
BOC Edwards Dry Vacuum Pump QDP80, and Blower, untested
ENI Genesis GW5002MA-F1H131-A3 3000W RF Generator W/Cal
ADVANCED ENERGY MDX DC power supply, lots of 7
Applied Materials AMAT 0010-21751 Resonator, 300 mm
GALIL DMC-1580 motion controller and power supply, rack
ADVANCED ENERGY Navigator RF Bias Match 3155126-008A
alcab pump 2033, leybold D90A, leybold D30A, Vac pump
AE Advanced Energy HFV 8000 RF Generator 3155083-109
ENI OEM-12B-07 RF Generator AMAT 0190-76048 calibrated
Thermonics T-2500 Precision Temperature Forcing System
Trazar Corp. RF Match RFDS-1, REV 3, P/N 553-07491-00
SEIKO SEIKI STP-H1301L1B Turbo cont LAM 796-360188-001
ENI MWD-25LD-02 RF MATCH
CTI Cryo pump 8, Model # 8033165, surplus item
BOC EDWARDS QDP 40 vacuum pump with Module, untested
COMDEL CLX-1250 2 MHz RF generator P/N FP1215R2
AE RF MATCH BOX NOVELLUS 19-111025-00 , used
RF SERVICES, MODEL RFS 716 P/N 233110-01A REV: A
RF SERVICES, MODEL RFS 716 P/N 233110-01 REV: A
Nova NovaScan 420 Controller new 210-48000-01
Genmark, precision automated transfer systems, 5064340
Novellus 02-103960-00 Controller Platb P166/64
COMDEL CLX-1250 RF Generator 1.75-2.15 MHz
Novellus Match 02-282128-00, used
ACL C13170 1.25kW Microwave power source
Novellus System 02-321899-00 REV.A Module controller
MKS ENI GMW-50 RF Generator, untested
Novellus 02-103970-00 ASSY,MOD CONT,P166/64 controller
BOC EDWARDS QDP 40 vacuum pump with Silencer, untested
BOC EDWARDS QDP 40 vacuum pump with Silencer, untested
BOC EDWARDS QDP 40 vacuum pump with Silencer, untested
BOC EDWARDS QDP 40 vacuum pump with Silencer, untested
ENI DPGS-10 DC Generator, AMAT 0190-36274, OEM BOX
7 STEC MFC SEC-4400M, O2, SiH4, Ar, BCl3, Cl2, used
Thermo Neslab M25 chiller, used, as is
Novellus 02-105005-00 ASSY,MC,P166,W/8 RS232 controller
EDWARDS DP80 Dry Vacuum Pump, used, as is
ENI OEM-25A-21091-51 RF Generator, 2500 W, 13.56 MHz,
RFPP RF Generator ICP-20P Model# 8511139050, 2000 W
Advanced Energy PDW 600, AE 3156014 Lam # 853-15516-003
ENI OEM-12B-07 RF Generator, 1200W at 13.56 MHz
Lot of 6 MFC, UNIT UFC-1660, N2, Cl2, He Unit MFC
Lot of 6 MFC, UNIT UFC-1660, O2, Cl2, Unit MFC
ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz, used
ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz, used
ENI GHW-12Z Genesis RF Generator 1250W, AMAT 0190-09832
ROLLER BRUSH CELL HDSIOC NOVELLUS 02-336512-00 REV. 1
HDSIOC ROLLER BRUSH NOVELLUS 02-308058-00 VERSION 4.72
XCEDA FAC HDSIOC NOVELLUS 02-309772-00 VERSION 4.72
ISOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV. A
PDL OXIDE HDSIOC 3 NOVELLUS 02-273741-00 VERSION 4.72
ISIOC DAMA CLEAN BB-DFE DIGITAL DYNAMICS G19-10000-00
APPLIED ENERGIES 750V 3153110-001
Pfeiffer TCP 600 Turbo pump Controller
ENI DCG-200 DC Plasma Generator, AMAT 0190-08033
AE Advanced Energy MDX-20K Master 3152223-003-Y, used
AE Advanced Energy MDX-20K Master, AE Model 3152223-003
AE Advanced Energy MDX-10K Master, AE Model 3152012-041
LAM 852-014681-583 RF Generator ENI OEM-6A-11491-52
Advanced energy 2026-000-D, ASM LDM PLASMA Generator
VARIAN Turbo-V 250 MACRO TORR turbo pump 969-9007S004
AE RFPP LF-5 RF Generator and RFPP ATL-100RA RF Match
ENI OEM-12A-21041-51 RF Generator, 1250W at 13.56 MHz
ENI OEM-12B-01 RF Generator, 1250W at 13.56 MHz, used
ENI OEM-12B-1 RF Generator, 1250W at 13.56 MHz, used
8 used Tylan FC-261 N2, H2, O2
ENI RF Generator OEM-12A, 1250W at 13.56 MHz
New MKS 655AD2N Pressure controller, manual MKS 600
Kinetics Thermal systems RC152ZLAM Chiller, Used
6 STEC MFC SEC-4400M, CL2, O2, SiF4, Used
6 STEC MFC SEC-4400M, NH3, CF4, CHF3, used
NEW VAT PM-5 Adaptive Pressure Cont, LAM 796-093088-004
NEW VAT PM-5 Adaptive Pressure Controller With manual
ENI OEM-6 RF Generator, ENI OEM-6AM-1B-21251, 750 Watt
ENI OEM-650A RF Generator, ENI OEM-6A-11491-52, 750 W
PCB Board OPTO22 LC4 001836L 94V-0, OPTO 22 EX2 001840D
STEC MFC SEC-4400MC, N2 and O2 TOTAL of 5 units
Leybold Turbo Controller NT 340M and NT 450, lot's of 4
Advanced Energy MDX-10K Slave, AE Model 3152012-043 X
Asyst Hine Design Process Chamber Elevator 04290-201
ENI AP-400BM1 Power Amplifer/Generator AP-400
TWO Luxtron 100C M-100 Temperature Control 0190-35236
ENI OEM-6 RF Generator, OEM-6AM-1, 13.56 MHz,used
ENI LPG-6A RF Generator, Low Frequency
ALD HDSIOC 0 NOVELLUS 02-295367-00 VERSION 5.0 REV. A
MKS 649A11T11CAVR N2 10 SCCM, 10 torr, lot of 6
CYBOR PUMP CONTROL MODULE MODEL 505E, 505C2
CYBOR CONTROL MODULE 00506-05 18 VDC 10.5 AMPS
ENI RF Generator LPG-6A , Low Frequency, used, as is
Comdel CPS500AS RF Generator, AMAT 0190-13320
3 Unit 3000 Series DeviceNet UFC-3165, AMAT 3030-03330
Osaka TD2001 Turbo controller
NOVELLUS 27-156710-00 CONTROLLER I/O DUALCAP VERS. 4.8
SIOC wts-vh sioc 1 NOVELLUS 02-123968-00 REV. 2
SEREN I1600 ICP Generator
vacuum chamber Flange, Cryo Turbo, Gate valve interface
ISIOC RF HCM PVD-PVD RACK NOVELLUS 02-124572-00 REV. 1
ISIOC HCM APVD NOVELLUS 02-276954-00 REV. 1
ISIOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV.A
SIOC WTS-HV SIOC 0 NOVELLUS 02-123962-00 REV. A
5 STEC MFC SEC-4400M C3F6, WF6, SiH4, used
Pfeiffer Balzers TPH 170 Turbo Pumps, PMP01210D619
MFC Mykrolis FC-2902MEP5-T, 5 SLPM, Gas N2 NEW lot of 2
MKS Foreline Heated Jacket, 2 Straight Line, 1 Elbow
Aligner up/down transmission #7458, 233435333
VME MOTOROLA 2304-900
2 NEW AMAT 0021-09552 Plunger throttle valve DPS cham
ENI OEM-650A RF Generator, ENI OEM-6A-11491-52, 750 W
EXFO Acticure A4000, Spot curing system, see pictures
4 Unit 8560 series UFC-8561C H2 HCL, AMAT 3030-12306
2 NEW AMAT 0021-09550 chassis plate throttle 5 phase
AMAT 0190-13407 AE PDX RF Generator 500W, 325-375 KHz
HAMAMATSU UV SPOT LIGHT SOURCE L8269-01
EFOS Novacure UV light source N2000
EFOS Novacure UV light source N2001-A1
EFOS Novacure UV light source N2001-A1, 4.0 AMP, 250V
EXFO Novacure Spot curing system N2100, 4.0 AMP, 250V
BOC EDWARDS Active gauge controller, 2 APG-L-NW16, more
HP DESC BOARD 05372-60006
HAMAMATSU UV SPOT LIGHT SOURCE L5662
MKS 653B-10-250-B THROTTLE VALVE
vacuum components, parts, valves lot's of 13
AE RFPP LF-5 500 Watts RF Generator, AE 3150012
Asyst OFH000Q Wafer Orientor
NEW NSK Precision products XY-FR-E067001 Lot's of 6
4 STEC MFC SEC-4400M Cl2, HBr, used
MKS BARATRON 531A11TBEH3, 1.333 KPa
Unit 9000 Series UFM-9660 He 6L Lot's of 3
TYLAN GENERAL, MDVX-100B, motor driven throttle valve
WILLIAMS advanced materials thin film products
2 NEW AMAT 0021-09549 Housing throttlbve 5 phase DPS
UNIT MFC UFC-1100A, Ar, O2, He, Hcl, lots of 10 used
Afinity Lydall chiller FWA, 208V, 3 phase
HEWLETT PACKARD 54504A DIGITIZING OSCILLOSCOPE 400MHz
RGA AMETEK Dycore M100 P/S, M100FG equipment Monitor
STEC LF-410A-EVD, TEPO 7.0 g/min Liquid Flow Controller
Shimadzu Turbo pump Controller EI-3203MD-A1, TMP-3203
Hine Design Process Chamber Elevator P/N 94-1118
2 Applied materials 0100-00423 GPLIS seriplex I/O Dist
NEW CTI-CRYOGENICS ADSORBER COMPRESSOR 8500, 8510, 9600
STEC 0.2g/min TEPO LFC LF-310A-EVD, calibration sheet
Advanced energy 2279-002-A
MFC Brooks 5866 N2 RT series, For Novellus gas box
vacuum chamber interface Flange, look very clean
STEC Inc MFT-20
Tylan 2900 MFC FC-2900M, CF4, He, CF4, CL2, lot's of 4
3 THORNTON DOT TWO RESISTIVITY INDICATOR CONTROLLER
AMAT 0010-75005 Centura load lock chamber
VARIAN PPM 992622, 87-195861, PCB, 40MHZ, DM992622-00
PORTER Liquid flow controller, P2000IBC010&P2000I-C020
LUMONICS EXTENDER BOARD 6050011 REV A
Swagelok 6LVV-DPVVR4-P-C, NEW in the box, lots of 8
STEC LF-310A, TEPO 0.25 g/min Liquid Flow Controller
STEC Liquid flow controller, LF-410A, TEOS, 4.0g/min
STEC LF-410A-EVD, TEB 2.0 g/min, TiCl4 2.0g/min , LFC
MKS Spectra vacuum controller LM59, lot's of 3
STEC LF-410A, TEPO 4.0 g/min Liquid Flow Controller
Tylan MFC FC-280, PC-580, N2O,N2,NH3,HE lots of 4
Neslab Chiller HX-75A, LAM 778-250779-00, No Compressor
Neslab Chiller HX-75A, TU-1 pump, No Compressor
UNIT UFC-1660, N2, SF6, Ar, lots of 3 used, as is
Leybold Quadruvac Q100 mass spectrometer, with cables
MITSUBISHI PLC A1S62PN, A1SHCPU, A1SX41, A1SX81, A1SY10
MOTOROLA MVME 2304-900, 147-011 84-W8964B01G, PCB
AMAT 0226-97904 Throttle valve for Etch Chamber, New
3 SMC NP420-DN1 SERIAL INTERFACE UNIT, SMC Manifold
GE FANUC SERIES 90-30 PROGRAMMABLE CONTROLLER, GE PLC
MISSING PULSE VME ELAS 016763 FB-B94V-0 PCB
MVME 2301-900 MOTOROLA 01-W3345F, PCB
LAM ceramic ring 716-011830-006
ICS ADVENT OEMC-06-06 module controller
CTI CRYOGENICS NETWORK INTERFACE, CTI MODEL 8113020G001
3 STEC MFC SEC-4400M BCl3 100 SCCM, used
New MRC AlCu Target from Williams Advanced Materials
STEC 4400, MFC, Ar, 2 SLM, Calibration sheet.
STEC MFC SEC-4400, Ar, 1 SLM WITH CALABRATION.
STEC MFC SEC-4400M NH3, 1 SLM, With CALABRATION SHEET
MKS BARATRON 628B13TBE1B, 1000 TORR, CALABRATION SHEET.
MILLIPORE inbliFlow DEVICE NET, N2, 50 ,400, 200 SCCM
Motion Engineering SA-NOV controller lot's of 2 used
STEC LF-310A, TEPO,0.25 g/min, liquid flow controller
AMAT 0010-0 09416 Etch Chamber RF Match, Untested used
Sieger Gas detection DIGI-CAT and DIGI-CHEM with sensor
Comdel, CPS-500AS RF Power source, AMAT 0190-13320
ENI VL-400 Phase shift controller
AMAT 0010-0 09416 Etch Chamber RF Match, Untested used
Lam 230-140148-308 ESC, 8 inch, look new in Box
SHB INSTRUMENTS MODLE 109 SCOPE
ASYST TECHNOLOGY P/N 01270-001, Cassette loader,
CTI ON-BOARD NETWORK TERMINAL CONNECTOR
Bentek DC PC BOARD, reliance, 03-188758-00, Novellus
UNIT UFC-8160, NF3, SiH4, PH3, lots of 3, used
PB02807 BM18164 DAN 9710094
BM26015/L AB26015/N ASSY, H-STN XORB-100
BM302960000 /D 9923DAN
502622 BM303030200
AMETEK 80440K 94V-0, REV B
19801004800874 JZ29A-01 MEIDEN, MU24A30756
FABR 016763 REV A
DSC-002 99A5 PCB BOARD
PTI4 4896
PROM DISK 66700301
TYLAN 2979M Mass Flow Controller FC-2979MEP5-WM, Gas O2
Phasetronics P1229 Driver, AMAT 0190-05682, 2 unit
Terranova 934 wide range vacuum gauge controller used
LAM 685-094680-001 LIGHT PEN 0080025890 interface PCB
MYKROLIS inbli flow 3XP, N2 1000SCCM lots of 2 used
NOVELLUS ISIOC HI-LO Transfer 02-150755-00 REV.A
ISIOC Power supply, 02-125105-00, 27-053659-00 used
NOVELLUS Controller I/O DUALCAP 27-156710-00, REV.C
MKS BARATRON 624A21TBC, 20 TORR, CALIBRATION SHEET.
MKS BARATRON 627A12TBC, 100 TORR, CALIBRATION SHEET.
MKS BARATRON 122B-11993, 100 TORR, CALIBRATION SHEET.
MFC Mykrolis FC-2902MEP5-T, 5 SLPM, Gas N2 NEW
TYLAN 2900M series MFC lots of 3, and TN2900 MFC, USED
SensArray TC Thermal, Model 482-05-0002
SensArray TC Thermal, Model 482-XX-0002
3 Unit MFC UFC-1100A, N2 1SLM, 300 SCCM, 50 SCCM NEW
DeviceNet Unit MFC UFC-8565, H2 2L, SIH4 30CC lots of 2
Unit MFC UFC-8561C, H2 100CC lots of 2 used
6 NEW AMAT4020-01416 filtr AIR/WTR 1000 PSIG vacuseal
IN USA NDIR OPTI-sense 5000 lots of 2, used,
11 MKS BARATRON 852B61PCJ2GC, 60 PSIA
HP 3335A SYNTHIESIZER / LEVEL GENERATOR
SVG90 Electronic Cabinet spare parts
MILLIPORE InbliFlow, N2 and SIH4 Used lots of 2
EDWARDS ACTIVE GAUGE CONTROLLER D38650000
MKS i-BARATARON DIGITAL MANOMETER DMA12TCECJNN633
Granville-Phillips 275 MINI-convectron lots of 3 used
MKS BARATRON 628B13TBE1B, 1000 TORR, very clean.
MKS BARATRON 629B13TBCJ1B, 1000 TORR, very clean
BELLOWS CYLINDER 80*60STMV lot's of 2
Perkin Elmer PVD 4400 Sputter Chamber Liner, very clean
STEC MFC SEC-4550, O2, 50 SLM, looks clean
STEC MFC SEF-8460SL, N2, 50 SLM, looks clean
7 Sanyo Denki PM0PA1C3P20 PM DRIVER TYPE C
MKS baratron 127AAX-000100T, 10 TORR lots of 2
MKS baratron 124AA-00010BB, 10 TORR, lots of 2
STEC 4.0g/min TEOS LFC LF-410A-EVD
EFD 1500XL LIQUID DISPENSER and Foot Paddle controller
Sorensen power supply, DCS80-13E, 0-80 V, 0-13 A, used
AMAT 0226-09937 and AMAT 0226-09677 Pump Dist PCB
PureDigital Mass Flow Controller 6256, WF6, lots of 2
UltraGlo vacuum general UV2-11 & UC2-31S01, N2
Aera MFC TC FC-980C, SiH4 1 SLM with Calabration SHEET
INFICON AG, LI-9496 Balzers, CDG100A, 100 TORR
MYKROLIS inbli flow 3XP, N2, 5000 SCCM lots of 3 used
COMDEL LFMN 8/5, novellus P/N 27-296658-00
MKS BARATRON 627B152TBC1B, 500 TORR, looks very clean
828-36-003 Lot of 2 Pole PC, Outer, Short
PHD, 4475-19 ParentD30, 0180502-3-01 Actuator, Mini Rot
899-02-054 Non-Cooled D.S.S. Plate Inset
828-36-002 Pole Pc Outer Long, 828-36-017, 828-20-005
MKS Spectra HPQ2, Microvion plus, Resist torr, lot's 3
Advanced Energy AE 3155039-000A TCM
SYSMELEC HANDHELD ROBOT & AUTOMATION CONTROLLER NO 181
TYLAN GENERAL, ADAPTORR MODEL AC-4, Millipore AC-4S02
TYLAN GENERAL, ADAPTORR MODEL AC-4, Millipore AC-4
MILLIPORE, ADAPTORR MODEL AC-2, Millipore AC213C REV C
Unit MFC 8565C, N2 750 SCCM NEW with calibration b
UNIT UFC-1660 N2, 50 SCCM, lots of 2, used, as is
STEC 0.2g/min TEPO LFC LF-310A-EVD
Vat Gate Valve, heater, 64248-XE52-1108, Looks clean
Leybold Turbotronik controller NT 340 M Turbo Pump
CTI CRYOGENICS KEYPAD, FOR ON-BOARD SYSTEM
CTI CRYOGENICS KEYPAD CONTROLLER, FOR ON-BOARD SYSTEM
MKS CDN391R AS01391-21-1 PCB
MKS CDN396R AS01396-6-5 PCB
Asyst SB-731 Robot Pendant Controller, Looks New
Asyst SB-731 Robot Pendant Controller, Looks New
VARIAN WAVEFORM GEN III ASSY 01907110 BOARD
ILLIMINA ASSY 250878 CCA, COMM, ACHIMEDES, 250659 REV A
EMC-1 94V0, BM23475L11R REV B
PRI EMC-1 94V0, BM23475L11R, PC23475 REV B COMP SIDE
Aera Mass Flow Controller FC-PA780c, C4F8 and H2/N2
AMAT ANALOG I/O BOARD 0100-20100 APPLIED MATERIALS
AMAT ANALOG I/O BOARD 0100-20003 APPLIED MATERIALS
AMAT 0190-76005 Board OREGAN MICRO SYSTEMS, REV B
AMAT 0100-20003 AI/O ANALOG I/O BOARD, REV G
AMAT 0100-20100 AI/O ANALOG I/O ASSY BOARD, REV P4
AMAT 0100-20100 AI/O ANALOG I/O ASSY BOARD, REV A
MKS CONTROL VALVE TYPE 153D-4-100-2, THROTTLE VALVE
MKS BARATRON 627B12TEC1B, 100 TORR, looks clean
STEC SEC-4550 MFC, N2, 30 SLM, used
STEC SEC-4550 MFC, N2, 30 SLM, used
STEC SEC-4550 MFC, N2, 40 SLM, used
STEC SEC-7355 MFC, Ar, 50 SLM, used
STEC SEC-4550 MFC, O2, 50 SLM, used
AMAT 0010-76968 OTF centerfinder emitter and 0100-76055
Motorola MVME 340B 01-W3787B01B PCB, 84-W8787B01C
STEC MFC PV-1000, Piezo valve PV-1501MC NEW
STEC MFC SEC-4600MO, N2, 100 SLM Used
BM06240 R/J, COMP SIDE REV F PB02807 PRI BOARD
18800045 SRV/S06D06 SCHALTER MICRO- mit ROLLE
BM19261L01/C
SHB INSTRUMENTS MODLE 109 SCOPE
Astec Power supply MP1-3Y-2Q-4NN-00, Part # 73-690-0267
PORTER Liquid flow controller P2000-C010, 10.0 ML/MIN
MASS FLOW CONTROLLER MC-2100 NEW
MASS FLOW CONTROLLER MC-4400 NEW
MASS FLOW CONTROLLER MC-2200 NEW
Mass Flow Meter 1258B, Argon, lots of 2 used
SMC NP420-DN1 VV5Q11-ULB980181
TYLAN GENERAL CDL-21S06-EMC 0-100 T0RR RANGE, lots of 3
UNIT 1660 UFC-1660 He 10 SLPM with calabration sheet
Novellus Controller I/ 0 Daulcap Firmware Version 4.8
SMC NP420-DN1 VV5Q11-ULB000047
SMC NP420-DN1 VV5Q11-ULB980180
MASS FLOW CONTROLLER 5877, He, 10 SCCM lots of 2 USED
UNIT MFC UFC-8165, 10L, Gas N2, NEW in box
UNIT UFC - 7000 industrial MFC, H2, 1.00 SLM, NEW
BOC EDWARDS interface module, U20000521 used
UNIT UFC-1660 CL2 200 SCCM and O2 50 SCCM, lots of 2
UNIT UFC-1660 CL2 200 SCCM and O2 1 SLPM, lots of 2
MKS Baratron 627A01TBC, 1 TORR with connection valves
Granville Phillips 370149 Vacuum Gauge controller, used
USED Kollmorgen Magnet Driver AMAT 0190-70060
MKS MFC DPCA12T51CB00, AMAT 3030-10854, 50 sccm He
EDWARDS Active gauge D14549000
Tylan 2950 MFC FC-2952M 4V bl, Co, CHF4, lot's of 2
SEMI GAS SYSTEM AUTOMATIC SWITCHOVER AND CYLINDER SCALE
2 STEC MFC SEC-4400MC N2, WF6, used
AMAT 0020-25836 PVD Clamp Ring 8 inch, very clean
Smart Cap Key - JSR - 1860 - 35, 4A-9-8, Lot of 15
BODINE ELECTRIC 42A3FEPM-E4 GEARMOTOR, 130 VOLTS, CLEAN
MILLIPORE FC-2902MEP-T, SIH4, 1.5 SLMP NEW
3 Mass Flow Meter Tylan FM-360, Argon and Air, untested
STEC PV-2000 MFC Piezo valve PV-2103MC NEW in box
STEC MFC SEC-4550M, N2, 40 SLM used
IRVINE OPTICAL CORPORATION 136PC1562
CT AURAVISION 94V-0 E92481
Tylan General CMLA-21 100 TORR CAPACITANCE GAUGE
LINTEC Liquid flow controller, TEOS, 0.1g/min used
Horiba Stec LF-310A-EVD TEPO 0.1g/min Liquid mass meter
Tylan 2900 MFC FC-2900M-EP, N2, 20 SLPM, lot's of 2
Tylan 2900 MFC FC-2900M-EP, O2, 20 SLPM, lot's of 2
RF MATCHING UNIT VSP-0971
Aera MFC FC-7800CD, SiH4 200 SCCM looks very clean
CTI-Cryogenics On Board P300 Module 8113160G001, 2 unit
TEMP CONTROLLER INR-244-402 WITH Omron BU SO4X
AMAT 0010-04926 HV Module CESC, untested
Jennings UCS-200-15S and CVCJ-1000-3S, looks very clean
Tylan General CMS-11S02, 0-10 TORR, lots of 2
ZYMARK MODULE EIA 112200
SEMITOOL 2601800 , 16750-505-0016
AMAT AFC 550, H2, 30 SLPM used
VERIFLO CORP GAS VALVE 45200254
APPLIED MATERIALS VALVE AIR ACTUATEO DIAPH
THERMOCOUPLE TYPE K 39 INCH VAC /39 INCH AIR KF40
PARKER VERIFLOW VALVE, 9444A0PLPN0SFSFF, 48200029
IN USA Ozone analyzer IN2000-L2RM, Used
AMAT 0140-09065 /chamber INTERFACE CABLE
AMAT 0226-09683 INTERFACE PUMP
MKS RGA Spectra Microvsion or HPQ2 + Vacuum Controller
RGA MKS Spectra Microvsion or HPQ2 & Vacuum Controlrer
HP 5328A UNIVERSAL COUNTER
Leitz Wetzlar Microscope bive lens NPL 20X/0.35
MKS Spectra HPQ2 and Spectra Vacuum Controller, RGA
MFC UFC-8160, N2 3 SLM, NH3 300 SCCM, lots of 2 used
Tylan 2900 MFC FC-2900M-EP, Ar 20 SLPM lots of 2 used
DAS-1801HC/1802HC 14257 REV A PC8632 BOARD
NATIONAL INSTRUMENTS GPIB-1014P
PT MVME 340B 84-W8787B01C
DMA-W CONTROLLER WESSELS/WOLEVER
TEKTRONIX HANDLER INTERFACE BD. 59-0550-01
SIEMENS 6EW1380-4AB01 POWER SUPPLY STROMVERSORGUNG
Tylan General CMLA-21 Pressure Sensor 0-100 TORR
MICROCON RINSER CONTROLLER C15S
HINE DESIGN BOARD ASSY 778-11, FAB 777, REV H
BROOKS Mass Flow Controller 5850, HCL3, 0-20 MLST/MIN
PRI BM06241 COMP SIDE REV F PB02807 BOARD
Mass Flow Meter 1258B, N2 gas, lots of 2 used
SVG 80166F2-01 STATION CPU BOARD
MLR I/O PRI PB18220 REV C COMP SIDE PRI, BM18220L01/F
PSW-3 94V-0 REV D, ASSY 01914116 PC BOARD
PCI BOARD 736/266-01
Aera MFC TC FC-980C, MULTI, MULTI-1
Aera MFC TC FC-980C, BCL3,100 SCCM
Aera MFC, 10 RA FC-980C, SiH4, 20 SCCM
Aera MFC FC-770AC Ar 200 SCCM
Aera MFC FC-770AC, N2 200 SCCM
Aera MFC, TC FC-980 PH3/He 500 SCCM 800PPM
Mykrolis CDL1102, 0-10 TORR lots of 2
MKS BARATRON 122BA-00100EB, 100 TORR
MKS BARATRON 122BA-01000EB, 1000 TORR, 0-10 VDC OUTPUT
Pump baldor VM3541 3/4HP & pump Head, looks clean
STEC LF-410A-EVD, TEOS,10 g/min, liquid flow controller
MKS Throttle Valve 153-E, used
MKS 253A-1-40-1 KF-40 Exhaust Throttle Control Valve
Liquid mass flow controller LF-310A-EVD, 0.5g/min used
Jennings UCS-300-7.5S, 10-300PF, 7.500 VOLTS, used
Jennings UCS-300-7.5S, 7.500 VOLTS, used
Jennings UCSV-250-15S, 15000 VOLTS, used
Used Jennings Tube UCS-300-7.5S, 7500 VOLTS, used
cybor power supply 512F
cybor power supply 512F
STEC LF-310A-EVD, TEB 0.1 g/min Liquid Flow Controller
STEC LF-310A-EVD, TEB 0.25 g/min Liquid Flow Controller
STEC LF-310A-EVD, TEB 0.5 g/min Liquid Flow Controller
PCB SCARA INTERCONN VER3, BM25060L01
Aera MFC FC-7800CU, O2, 2 SLM used
Aera MFC FC-7810CU, C2F6, 2 SLM used
Unit 3160 DeviceNet UFC-3165 N2 100L, AMAT 0190-24829
APPLIED MATERIALS POWER SUPPLY DC + 2KV #5KV
5 WATLOW DIN-a-Mite Style A Controller AMAT 1200-01283
Fuji IMVAC AVR-50Throttle Valve, used clean
FOUR MKS HPS 325 MODUCELL VCR connection VACUUM GAUGE
SensArray corporation 1530A-8-0123 Instrumented wafers
SensArray corporation 1530A-8-0005 Instrumented wafers
DIGIBOARD DBI 30000352 , PC/4 16C550, DBI 30000354
FSC 4321 FIRE BUS S/N 127256 M/N SS4-A
0P76003 JITTER GENERATOR
2 HARMONIC DRIVE SYSTEMS Hi-T Drive Step Motor
9535006 0411577500
PRI BM26012 AB26012 and BM26011/K, Assy, V-STN XORB-100
116335 381163500
RENISHAW X-Y Stage, XY Stage S83867
Inficon Capacitance Diaphragm Gauge CDG100A , 1333.22Pa
SMC NCDQB125-U1A97 Pneumatic Cylinder AMAT 0010-03051
6 AMAT 0020-18513, Diffuser, Clean port, HDPCVD ULTIMA
LINTEC mass flow controller LM-1100M-8, TEOS 0.1 g/min
MDC Humphrey KIV-075-P Inline Angle Valve KF-25 NW25
AMAT 0020-18385 Block, Daul Gas Feed HDPCVD Ultima, New
EFD 900-15 Epoxy Dispensing System, look very clean
E237456 HK-004 94V-0
MKS Baratron 122BA-01000EB, 1000 Torr,
MKS Baratron 127AA-000-1E, Range: .1 Torr
CTI ON-BOARD RETROFIT INTERFACE, CTI 8115236G001
Mykrolis InbliFlow DEVICE NET, N2, 10000 SCCM, used
Ring, Spacer, SS D123466
Microscope Objective Lens SP 100X/1.25 OIL 0.17
LEITZ WETZLAR NPL 20X/0.40 LEITZ ICR 20X/0.40 P
USED, EUROTHERM TEMPERATURE CONTROLLER, GPC8422
ProgramMation C198/-90 BM23995 PC BOARD lot's of 2
ProgramMation C198/-90 BM23995 PC BOARD lots of 2 REV E
HORIBA STEC injection valve IV-2410AV-03 used
HORIBA STEC injection valve IV-2410AV-02H used
HORIBA STEC injection valve IV-2410AV used
USED MDC VACCUM INLINE VALVE KIV-150-P
NEW Cole-parmer 04638-, 04639-series Magnetic series
DBI 30000354 Full Size ISA I/O Card, REV N
DBI A/N 30000354 Full Size ISA I/O Card, REV M
DBI 30000354 Full Size ISA I/O Card, REV M
李培根指出，設(shè)計(jì)是產(chǎn)品創(chuàng)新的第一步，決定了產(chǎn)品成本的70%，是延伸產(chǎn)業(yè)鏈和創(chuàng)新鏈的關(guān)鍵環(huán)節(jié)，相關(guān)部門須高度重視。
他強(qiáng)調(diào)，對(duì)制造業(yè)而言，創(chuàng)新能力建設(shè)是實(shí)現(xiàn)創(chuàng)新驅(qū)動(dòng)發(fā)展戰(zhàn)略的保障。對(duì)此要著力解決科技與經(jīng)濟(jì)結(jié)合不緊密的問題，以改革激發(fā)企業(yè)的創(chuàng)新動(dòng)力，促進(jìn)企業(yè)真正成為技術(shù)創(chuàng)新的主體。要加強(qiáng)產(chǎn)業(yè)共性技術(shù)的研究開發(fā)，為技術(shù)和產(chǎn)品創(chuàng)新提供取之不盡的思想源泉。
要不斷強(qiáng)化制造業(yè)的基礎(chǔ)，包括基礎(chǔ)材料、基礎(chǔ)零部件、基礎(chǔ)制造工藝和技術(shù)基礎(chǔ)。工業(yè)“四基”在很大程度上決定著產(chǎn)品質(zhì)量的優(yōu)劣，是提高產(chǎn)品質(zhì)量的基礎(chǔ)，應(yīng)高度重視。
根據(jù)相關(guān)規(guī)劃，在2020年之前，我國(guó)將選擇與國(guó)際先進(jìn)水平較為接近的8大產(chǎn)業(yè)，包括航天裝備、通信裝備、發(fā)電與輸變電裝備、工程機(jī)械、軌道交通、鋼鐵、石油煉制、家用電器等方面，進(jìn)行重點(diǎn)突破，力爭(zhēng)到2020年實(shí)現(xiàn)又大又強(qiáng)。
此外，還要大力支持和優(yōu)先發(fā)展國(guó)民經(jīng)濟(jì)、國(guó)防建設(shè)和人民生活休戚相關(guān)的5大戰(zhàn)略必爭(zhēng)產(chǎn)業(yè)。在集成電路及其專用生產(chǎn)裝備，數(shù)控機(jī)床與基礎(chǔ)制造裝備，航空裝備，海洋工程裝備及船舶，汽車等領(lǐng)域，要掌握核心技術(shù)，縮短與國(guó)際先進(jìn)水平的差距，能基本滿足國(guó)內(nèi)需求。
據(jù)李培根介紹，目前政府部門正在制定的《中國(guó)制造2025》，四大轉(zhuǎn)變和一條主線分別為：由要素驅(qū)動(dòng)向創(chuàng)新驅(qū)動(dòng)轉(zhuǎn)變；由低成本競(jìng)爭(zhēng)優(yōu)勢(shì)向質(zhì)量效益競(jìng)爭(zhēng)優(yōu)勢(shì)轉(zhuǎn)變；由資源消耗大、污染物排放多的粗放制造向綠色制造轉(zhuǎn)變；由生產(chǎn)型制造向服務(wù)型制造轉(zhuǎn)變。主線則是將體現(xiàn)信息技術(shù)與制造技術(shù)深度融合的數(shù)字化智能化制造作為今后發(fā)展的主線。
