序號(hào) 功用及設(shè)置 出廠值
Advanced Energy MDX 5K Magnetron Drive
Advanced Energy AE Fixed RF Match AMAT 3155077-001a
ADVANCED ENERGY 3152012-041 MDX-10K MASTER POWER SUPPLY
AE Advanced Energy RFPP RF Match 7621993020 working
AE ADVANCED ENERGY 3157512-006D PE-POWER PACK AC PLASMA
AE Advanced Energy RF Match Network 3155031-014D
AE Advanced Energy Navigator 1013 RF Match 3155126-017A
AE Advanced Energy 2500W RF Match 3150275-007G working
Advanced Energy Veeco FSJ4-50B 32' Cable DIN 1340186
Advanced Energy RFPP AM-10 Automatch Network 8400003010
AE RFPP Advanced Energy LF-5 500W Generator 3150012-009
AE Advanced Energy RFPP LF-5 Generator 7520572050 500W
Advanced Energy RF Generator 13.56 MHz RFG 3001 NEW
ADVANCED ENERGY 3152362 MDX PINNACLE 6kW POWER SUPPLY
ADVANCED ENERGY MDX II 3152264-000 CONTROL UNIT NEW
AE Advanced Energy RFDS 2000-2V RF Gen. 3155038-013C
Advanced Energy PDX 500 RF Gen. 3156024-105C working
Advanced Energy Circuit Board 1302149 1302149D
AE Advanced Energy Remote Plasma Source 3151801-001F
Advanced Energy Tuner Control 3150302
AE Advanced Energy MDX-5K Power Supply 2011-035-Y 5kW
Lam Advanced Energy 4MHz Bias Match 660-095275-005 New
AE Advanced Energy MDX-20K Master 3152223-003-Y 20kW
AE Advanced Energy MDX-L6 Magnetron 3152343-000A
AE Advanced Energy PDX 1250 RF Generator 3156024-131A
Advanced Energy 2189 Ratio Transber RF Match Box
AE Advanced Energy PDX 1250 RF Generator 3156024-131A